SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The 
1 5 5.5 7.5 1 [3.5] 6 5.5 9 10 1 5 5.5 7.5 17 19 22.5 24.5 10 9.5 13 14 5 9 9.5 11.5 5 4.5 0.5 1.5 10 9.5 13 14 5 9 9.5 11.5 10 9.5 13 14 5 9 9.5 11.5 0.5 [3] 3.5 [1] 5.5 [3] DDouble Acting, Double Rod 1.5 2 6 7 19.5 21.5 25 27 2.5 3 2 4 12 16 20 25 5.5 5 10 12 3.5 [6] 3 [5.5] 8 [10.5] 10 [12.5] 1.5 2 6 7 5.5 5 10 12 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16
Allowable kinetic energy (J) Applicable bore size (mm) Bolt Proper tightening torque (Nm) 3.8 x 10-3 6.25 x 10-3 9.35 x 10-3 12.5 x 10-3 0.030 0.053 0.077 0.54 20% (0.432 to 0.648) 4 M2.5 x 0.45 6 8 10 12 16 (Supply pressure: P = 0.5 MPa) 1.06 20% (0.848 to 1.272) M3 x 0.5 100 3.27 20% (2.61 to 3.92) M4 x 0.7 10 20 16 12 10 Load mass m1 + m2 (kg) 6.6 20% (5.28 to 7.92) 20 M5 x 0.8 Torque
x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)
D-M9A D-M9V Qty. of auto switches mounted D-A9 D-M9 D-P3DW Note 1) 5 10(5) 15 (10) 15 (5) 1 pc. 10 15 5 10 10 15 (10) 15 (5) 2 pcs. 10 15 5 Note 1) 25 is only applicable for D-P3DW.