SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The 
1 5 5.5 7.5 1 [3.5] 6 5.5 9 10 1 5 5.5 7.5 17 19 22.5 24.5 10 9.5 13 14 5 9 9.5 11.5 5 4.5 0.5 1.5 10 9.5 13 14 5 9 9.5 11.5 10 9.5 13 14 5 9 9.5 11.5 0.5 [3] 3.5 [1] 5.5 [3] DDouble Acting, Double Rod 1.5 2 6 7 19.5 21.5 25 27 2.5 3 2 4 12 16 20 25 5.5 5 10 12 3.5 [6] 3 [5.5] 8 [10.5] 10 [12.5] 1.5 2 6 7 5.5 5 10 12 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16
Clean Series: 10 (Relief Type), Magnet: D (Built-in), Bore Size: 20mm, Stroke: 25mm, Rod End Thread: M (Male), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Clean Series: 10 (Relief Type), Magnet: D (Built-in), Bore Size: 20mm, Stroke: 25mm, Rod End Thread: M (Male), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal
Clean Series: Relief Type, Magnet: Built-in, Bore Size: 20mm, Stroke: 25mm, Rod End Thread: Male, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -